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AMAS
MLG
MFG
MSB
DPT
Shape of Unit Pattern
Rectangle
Circle
Polygon
Donut
Width(x) of Unit Pattern
um, Height(y)
um
Pattern Pitch in X direction
um, in Y Direction
um
Window Range (
,
)(
,
) um
Bottom-left Unit Pattern's
Center
Lower-left Corner
Upper-right Corner
Upper-left Corner
Lower-right Corner
at (
,
)
Output GDS Layer
Output GDS Filename
.gds
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Email address to receive the GDS:
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